DocumentCode :
1132276
Title :
A 12–18-GHz Three-Pole RF MEMS Tunable Filter
Author :
Entesari, Kamran ; Rebeiz, Gabriel M.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Univ. of Michigan, Ann Arbor, MI, USA
Volume :
53
Issue :
8
fYear :
2005
Firstpage :
2566
Lastpage :
2571
Abstract :
This paper presents a state-of-the-art RF microelectromechanical systems (MEMS) wide-band tunable filter designed for the 12–18-GHz frequency range. The coplanar-waveguide filter, fabricated on a glass substrate using loaded resonators with RF MEMS capacitive switches, results in a tuning range of 40% with very fine resolution, and return loss better than 10 dB for the whole tuning range. The relative bandwidth of the filter is 
over the tuning range and the size of the filter is 8 mm 
mm. The insertion loss is 5.5 and 8.2 dB at 17.8 and 12.2 GHz, respectively, for a 2- 
bias line. The loss improves to 4.5 and 6.8 dB at 17.8 and 12.2 GHz, respectively, if the bias line resistance is increased to 20 . The measured 
level is 
37 dBm for 
kHz. To our knowledge, this is the widest band planar tunable filter to date.
over the tuning range and the size of the filter is 8 mm mm. The insertion loss is 5.5 and 8.2 dB at 17.8 and 12.2 GHz, respectively, for a 2- bias line. The loss improves to 4.5 and 6.8 dB at 17.8 and 12.2 GHz, respectively, if the bias line resistance is increased to 20 . The measured level is 37 dBm for kHz. To our knowledge, this is the widest band planar tunable filter to date.Keywords :
coplanar waveguides; microswitches; microwave filters; poles and zeros; radiofrequency integrated circuits; waveguide filters; 12 to 18 GHz; 4 mm; 5.5 dB; 8 mm; 8.2 dB; RF MEMS capacitive switches; bias line resistance; coplanar-waveguide filter; glass substrate; insertion loss; loaded resonators; microelectromechanical systems; three-pole RF MEMS tunable filter; wide-band tunable filter; Bandwidth; Frequency; Glass; Insertion loss; Micromechanical devices; Radiofrequency microelectromechanical systems; Resonator filters; Switches; Tuning; Wideband; Coplanar-waveguide (CPW) filter; RF MEMS; loaded resonators; microelectromechanical systems (MEMS); wide-band tunable filter;
fLanguage :
English
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9480
Type :
jour
DOI :
10.1109/TMTT.2005.852761
Filename :
1492655
Link To Document :
