Transient compact model of fixed-fixed beams with dielectric charging

This paper presents a compact model for Fixed-fixed beams (FFBs), which are commonly found in Micro-electromechanical systems such as RF MEMS switches and Microspectrometers. A major limitation of these devices is the presence of dielectric charging effects. Which introduce hysteresis in the actuation voltage-displacement relationship. A transient simulator is required to evaluate schemes aimed at overcoming this effect. In this paper, a compact model for such a simulator is proposed to enable system-level simulation of fixed-fixed beams (FFBs). The proposed model exploits lumped element kinematics and integrates an empirical model of dielectric charging. Implemented in SPICE, the simulator integrates user parameters extracted from finite element model simulations and experimental measurements.