DocumentCode :
1139482
Title :
Modeling and Design of a Magnetically Actuated Two-Axis Compliant Micromanipulator for Nanomanipulation
Author :
Jayanth, G.R. ; Menq, Chia-Hsiang
Author_Institution :
Dept. of Mech. Eng., Ohio State Univ., Columbus, OH, USA
Volume :
15
Issue :
3
fYear :
2010
fDate :
6/1/2010 12:00:00 AM
Firstpage :
360
Lastpage :
370
Abstract :
This paper presents the modeling and design of a novel magnetically actuated compliant micromanipulator based on the atomic force microscope (AFM) probe. The manipulator can control the Z -position of the tip and its orientation about the longitudinal axis. It enables sensitive interaction with the sample along two axes and is therefore a useful 3-D tool for metrology and manipulation at the micro/nanoscale. The model for the actuation scheme is first presented. Subsequently, the quasi-static and dynamic lumped parameter models of the two-axis manipulator are developed. The developed models are used to propose a systematic procedure to design the probe. The design is evaluated by means of finite-element analysis, and the results are compared with the prediction of the lumped parameter model. Finally, the manipulator is fabricated, and the experimentally measured dynamics is shown to agree well with the results of modeling and simulation.
Keywords :
atomic force microscopy; control system synthesis; finite element analysis; micromanipulators; modelling; nanotechnology; atomic force microscope; finite-element analysis; magnetically actuated two-axis compliant micromanipulator; modeling; nanomanipulation; Actuators; atomic force microscope (AFM); manipulators;
fLanguage :
English
Journal_Title :
Mechatronics, IEEE/ASME Transactions on
Publisher :
ieee
ISSN :
1083-4435
Type :
jour
DOI :
10.1109/TMECH.2009.2026170
Filename :
5166470
Link To Document :
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