A new two-dimensional fast steering mirror based on piezoelectric actuators

A new two-dimensional fast steering mirror (FSM) based on piezoelectric actuators is designed, which has high scanning angle and resonance frequency. The FSM is driven by three piezoelectric actuators. Each piezoelectric actuator and its displacement amplification mechanism compose of the Amplified Piezoelectric Actuator (APA). The three APAs have a staggered arrangement to acquire compact structure and close driven point. The mechanism structure and principle of the FSM are introduced. The algorithm of decoupling and hysteresis compensation is proposed. In order to test the performance of the FSM, a performance test system is built up. The test result shows that the FSM has a two-dimensional scanning angle of 2°, two axis´ nonlinearities of 1.7% and 1.1% after compensation and main resonance frequency of 640Hz and 1290Hz.