Title :
Development of a microprocessor interface to a scanning electron microscope
Author :
Raja, N.K.L. ; Karkare, Vishahka G. ; David, Sunil K.
Author_Institution :
Central Electron. Eng. Res. Inst., Pilani Rajasthan, India
fDate :
8/1/1989 12:00:00 AM
Abstract :
The development and applications of a microprocessor interface to a scanning electron microscope (SEM) for SEM image acquisition and electron-beam writing is described. The design considerations and system-related constraints along with necessary modifications to the SEM are presented. Hardware and software optimization is attempted, and the approach is discussed. Some results of applications are presented
Keywords :
computer interfaces; computerised instrumentation; data acquisition; microcomputer applications; physics computing; scanning electron microscopy; SEM image acquisition; electron-beam writing; microprocessor interface; optimization; scanning electron microscope; Application software; Cathode ray tubes; Displays; Electron beams; Intensity modulation; Microprocessors; Optical microscopy; Optical modulation; Scanning electron microscopy; Voltage;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
