Title :
Design of a MEMS acoustical beamforming sensor microarray
Author :
Chowdhury, Sazzadur ; Ahmadi, Majid ; Miller, William C.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Windsor, Ont., Canada
fDate :
12/1/2002 12:00:00 AM
Abstract :
This paper describes the design methodology for a microelectromechanical systems (MEMS)-based acoustical beamforming sensor microarray. The proposed acoustical array offers the potential of controlled directional sensitivity with constant beamwidth when used in conjunction with the appropriate digital signal processor. The array has been designed for use in a hearing instrument with a digital beamsteering engine to provide controlled directional sensitivity and constant beamwidth over the audio frequency range to improve speech intelligibility in noisy and reverberant environments. A MEMS-based packaging solution that allows the sensor array to be mounted in the ear canal is also described. The MEMS sensor-package interface features microspring contacts that enable low impedance connectivity between the sensor array and the related microelectronics. This allows the array to be easily removed for cleaning or replacement purposes.
Keywords :
acoustic transducer arrays; array signal processing; hearing aids; microphones; microsensors; packaging; sensitivity; speech intelligibility; sputter etching; MEMS acoustical beamforming sensor microarray; MEMS-based packaging solution; array fabrication processes; audio frequency range; capacitive microphones; capacitive-type acoustical sensors; constant beamwidth; controlled directional sensitivity; design methodology; digital beamsteering engine; digital signal processor; ear canal mounting; hearing instrument; low impedance connectivity; microelectromechanical systems; microelectronics; microspring contacts; noisy environments; reverberant environments; sensor array; speech intelligibility improvement; Acoustic sensors; Array signal processing; Auditory system; Design methodology; Digital signal processors; Microelectromechanical systems; Micromechanical devices; Sensor arrays; Sensor phenomena and characterization; Sensor systems;
Journal_Title :
Sensors Journal, IEEE
DOI :
10.1109/JSEN.2002.807773