Title :
Silicon monolithic MM-wave integrated circuit (SIMMWIC) devices mounted up-side-down on a copper heat sink integral with cavity resonator
Author :
Presting, Hartmut ; Buechler, Josef ; Kuisl, Max ; Strohm, Karl Matthias ; Luy, AnJohann-Friedrich
Author_Institution :
Res. Center, Daimler-Benz AG, Ulm, Germany
fDate :
9/1/1994 12:00:00 AM
Abstract :
Silicon monolithic MM-wave integrated circuits (SIMMWIC) used as oscillators in radar system applications in the 60-80 GHz regime are mounted on a heat sink with integrated resonator. The heat sink consists of a thin carrier plate (aluminum nitride (AlN) or copper (Cu)) and and a gold plated copper block with integrated resonator cavity. The resonator cavity is formed by a rectangular cavity milled in the Cu block, terminated on the top by the gold plated carrier plate on top of which a MM-wave emitting integrated coplanar slot-transmitter is mounted up-side-down. The main part of the emitted RF power is radiated through the substrate-perpendicular to the chip plane-the other part is coupled through a slit on the carrier plate into the resonator cavity leading to a higher spectral purity and a stabilization of the oscillating frequency
Keywords :
IMPATT diodes; MMIC; cavity resonators; copper; elemental semiconductors; frequency stability; heat sinks; microwave integrated circuits; microwave oscillators; packaging; radar transmitters; silicon; 60 to 80 GHz; AlN; Au plated Cu block; Au-Cu; Cu heat sink; EHF; IMPATT oscillator; MIMIC; Si; cavity resonator; coplanar slot-transmitter; integrated resonator; monolithic MM-wave IC; oscillating frequency; oscillators; radar system applications; rectangular cavity; stabilization; thin carrier plate; up-side-down mounting; Aluminum nitride; Application specific integrated circuits; Copper; Gold; Heat sinks; Monolithic integrated circuits; Oscillators; Radar applications; Radio frequency; Silicon;
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
