Title :
Flying height measurement metrology for ultra-low spacing in rigid magnetic recording
Author :
Li, Yufeng ; Menon, Aric
Author_Institution :
Samsung Inf. Syst. Americ, San Jose, CA, USA
fDate :
1/1/1996 12:00:00 AM
Abstract :
Flying height measurement metrology is presented for ultra-low spacing in rigid magnetic recording. The issues related to the intensity interferometric flying height measurement method are studied. This includes the flying height measurement shift induced by slider material, the dependence of slider optical constants on measurement angle of incidence and location, flying height measurement repeatability, flying height tester calibration, and the effect of the glass disk
Keywords :
height measurement; light interferometry; magnetic recording; optical constants; spatial variables measurement; flying height measurement metrology; glass disk; intensity interferometric method; repeatability; rigid magnetic recording; slider optical constants; tester calibration; ultra-low spacing; Calibration; Glass; Goniometers; Magnetic materials; Magnetic recording; Materials testing; Metrology; Optical interferometry; Optical materials; Optical recording;
Journal_Title :
Magnetics, IEEE Transactions on
