Transport of sputtered atoms investigated by Monte Carlo method

Increasing attention has been paid to the sputtering process as a tool to deposit films and to the study of the interaction between the film properties and the deposition parameters. It is obvious that the energy and direction of these particles arriving at the substrate is in close relation with the transport process from the target to the substrate. This work deals with the computer simulation of the sputtered Ag atoms trajectories through the background gas in a diode-sputtering configuration. For that, we have developed a numerical model to simulate the transport process. We followed the three-dimensional trajectory of each sputtered atom separately and calculated the scattering angle and the energy loss if a collision took place. A statistical method, Monte Carlo simulations is used. The model predicts the flux of Ag atoms arriving at the substrate, their energies and angular distribution. The dependence of the deposition rates of Ag atoms on the gas pressure and the distance between target to substrate were investigated.