Title :
Guest Editorial Introduction to the Focused Section on Mechatronics for MEMS and NEMS
Author :
Jalili, Nader ; Liu, Peter X. ; Alici, Gursel ; Ferreira, Antoine
Abstract :
The seven papers in this focused section present recent research in the general area of mechatronics for MEMS and NEMS from modeling and control to sensing/actuation and manipulation.
Journal_Title :
Mechatronics, IEEE/ASME Transactions on
DOI :
10.1109/TMECH.2009.2026008
