Title :
A field-effect device based on an exfoliated thin film of few-layer graphene
Author :
Kasjoo, Shahrir R. ; Ramli, Muhammad M. ; Zakaria, M.R. ; Arshad, M. K. Md ; Ayub, R. Mat ; Rahim, R.A. ; Hashim, U.
Author_Institution :
Sch. of Microelectron. Eng., Univ. Malaysia Perlis (UniMAP), Arau, Malaysia
Abstract :
In this work, a back-gated field-effect device based on an exfoliated thin film of few-layer graphene (FLG) has been fabricated and some of its properties were characterized. The estimated hole mobility of the FLG film, extracted from the device transconductance, was approximately 843 cm2V-1s-1 which was lower than the typical reported values. The reasons for the lower mobility were briefly discussed in terms of charged impurity density, and contact resistance between FLG film and metal. The use of mechanical exfoliation method in producing thin films of FLG, which is cheap, fast and simple, can also be exploited in the development of other graphene-based devices.
Keywords :
contact resistance; field effect devices; graphene; hole mobility; semiconductor thin films; FLG film; back-gated field-effect device; charged impurity density; contact resistance; device transconductance; estimated hole mobility; exfoliated thin film; few-layer graphene; graphene-based devices; mechanical exfoliation method; Films; Graphene; Impurities; Logic gates; Optical device fabrication; Silicon; Substrates; charged impurity density; contact resistance; field-effect device; graphene; mobility; transconductance;
Conference_Titel :
Semiconductor Electronics (ICSE), 2014 IEEE International Conference on
Conference_Location :
Kuala Lumpur
DOI :
10.1109/SMELEC.2014.6920874