DocumentCode :
1152447
Title :
Two-dimensional monomode fibre array manufacture using UV-LIGA process
Author :
Weiland, D. ; Lützelschwab, M. ; Desmulliez, M.P.Y.
Author_Institution :
Microsystems Eng. Centre, Heriot-Watt Univ., Edinburgh, UK
Volume :
41
Issue :
17
fYear :
2005
Firstpage :
978
Lastpage :
979
Abstract :
A method to manufacture two-dimensional bundles of singlemode optical fibres is described. Submicron translational alignment accuracy is demonstrated by combining electrostatic movement and optical monitoring of the actual fibre position in a closed loop feedback alignment system.
Keywords :
LIGA; optical arrays; optical fabrication; optical fibres; ultraviolet lithography; 2D monomode fibre array manufacture; UV-LIGA process; closed loop feedback alignment system; electrostatic movement; fibre position; optical monitoring; singlemode optical fibres; submicron translational alignment accuracy;
fLanguage :
English
Journal_Title :
Electronics Letters
Publisher :
iet
ISSN :
0013-5194
Type :
jour
DOI :
10.1049/el:20051894
Filename :
1500295
Link To Document :
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