Investigation of the scaling rules determining the performance of film bulk acoustic resonators operating as mass sensors

Author

Weber, Jan ; Link, Mathias ; Primig, Robert ; Pitzer, Dana ; Wersing, Wolfram ; Schreiter, Matthias

Author_Institution

Corp. Technol., Siemens AG, Munchen

Volume

54

Issue

2

fYear

2007

fDate

2/1/2007 12:00:00 AM

Firstpage

405

Lastpage

412

Abstract

Solidly mounted (SMR-type) thin film bulk acoustic resonators operating at 2.2, 4.1, and 8.0 GHz and with lateral extents from 30 to 500 mum were fabricated and their performance as mass sensors was evaluated theoretically as well as experimentally. It was found that increasing the frequency leads to a principally improved performance of these devices. Problems arising for the horizontal as well as the vertical dimension and structure are investigated

Keywords

acoustic resonators; bulk acoustic wave devices; mass measurement; sensors; thin film devices; 2.2 GHz; 30 to 500 micron; 4.1 GHz; 8.0 GHz; film bulk acoustic resonators; horizontal dimension; mass sensors; scaling rules; structure; vertical dimension; Acoustic devices; Acoustic sensors; Biosensors; Electrodes; Film bulk acoustic resonators; Q factor; Resonant frequency; Resonator filters; Signal resolution; Thin film sensors; Acoustics; Computer Simulation; Computer-Aided Design; Electrochemistry; Equipment Design; Equipment Failure Analysis; Manometry; Membranes, Artificial; Models, Theoretical; Reproducibility of Results; Sensitivity and Specificity; Transducers;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/TUFFC.2007.254

Filename

4107699