Title :
A CMOS rotary encoder using magnetic sensor arrays
Author :
Nakano, Kazuhiro ; Takahashi, Toru ; Kawahito, Shoji
Author_Institution :
Graduate Sch. of Electron. Sci. & Technol., Shizuoka Univ., Japan
Abstract :
A new type of small magnetic rotary encoder is presented. The device detects the magnetic field of a permanent magnet attached to the end of the rotating shaft using complementary metal-oxide semiconductor (CMOS) magnetic sensors [magnetic field effect transistor (MAGFET) arrays] set in a square arrangement. The sensor array is integrated onto a CMOS chip along with angle-detection circuits, leading to the realization of a compact, cost-effective rotary encoder. A prototype sensor chip with dimensions of 4.3×4.3 mm2 is shown to provide error as low as 3.5° without offset calibration and 0.36° with offset calibration, based on an angle calculation method with mean square estimation. This result shows that the CMOS rotary encoder can achieve resolution of 10 bits/rotation at the cost of calibration.
Keywords :
CMOS integrated circuits; magnetic field effects; magnetic sensors; microsensors; permanent magnets; CMOS rotary encoder; angle calculation method; angle-detection circuits; complementary metal-oxide semiconductor magnetic sensors; integrated sensor; magnetic field effect transistor arrays; magnetic rotary encoder; magnetic sensor arrays; mean square estimation; permanent magnet; prototype sensor chip; Calibration; Circuits; FETs; MOS devices; Magnetic semiconductors; Magnetic sensors; Permanent magnets; Prototypes; Sensor arrays; Shafts; Complementary metal–oxide semiconductor (CMOS); integrated sensor; magnetic field effect transistor (MAGFET); rotary encoder;
Journal_Title :
Sensors Journal, IEEE
DOI :
10.1109/JSEN.2005.853597