TLP systems with combined 50- and 500-Ω impedance probes and Kelvin probes

Author

Grund, Evan ; Gauthier, Robert

Author_Institution

Oryx Instrum. Corp., Fremont, CA, USA

Volume

28

Issue

3

fYear

2005

fDate

7/1/2005 12:00:00 AM

Firstpage

213

Lastpage

223

Abstract

Transmission line pulse (TLP) systems are mainly classified by their impedance, such as a 50- or 500-Ω current source. A new TLP configuration allows switching between 50 and 500 Ω by computer control to characterize a given part using both impedances. In addition, a four-needle Kelvin technique is introduced to TLP, which overcomes the measurement error from variations in contact resistance where the probe needles contact the wafer surface.

Keywords

contact resistance; integrated circuit testing; measurement errors; probes; pulse measurement; test equipment; time-domain reflectometry; transmission lines; 50 ohm; 500 ohm; Kelvin probes; TLP systems; computer control; contact resistance; electrostatic devices; electrostatic discharges; four-needle Kelvin technique; impedance probes; measurement error; probe needles; pulse circuits; pulse measurements; switching; time domain reflectometry; transmission line pulse systems; Contact resistance; Current measurement; Electrostatic discharge; Impedance; Kelvin; Needles; Probes; Pulse measurements; Switches; Voltage; Electrostatic devices; electrostatic discharges; pulse circuits; pulse measurements; reflectometry; transmission line measurements;

fLanguage

English

Journal_Title

Electronics Packaging Manufacturing, IEEE Transactions on

Publisher

ieee

ISSN

1521-334X

Type

jour

DOI

10.1109/TEPM.2005.854298

Filename

1506868