Proton implanted singlemode holey vertical-cavity surface-emitting lasers

Wedge-shaped holes have been fabricated in the top mirror of proton implant confined vertical-cavity surface-emitting lasers. The index confinement and selective loss introduced by these patterns improved the performance by both increasing the singlemode power and reducing the threshold current of the lasers. A maximum single fundamental mode power of 3.5 mW with a simultaneous reduction of lasing threshold compared to an unmodified laser was observed. Multimode operation was suppressed over the entire laser operating range.