Title :
An ink-jet-deposited passive component process for RFID
Author :
Redinger, David ; Molesa, Steve ; Yin, Shong ; Farschi, Rouin ; Subramanian, Vivek
Author_Institution :
Electr. Eng. & Comput. Sci. Dept., Univ. of California, Berkeley, CA, USA
Abstract :
An all ink-jet-deposited process capable of creating high-quality passive devices suitable for an RFID front-end is described. Gold nanocrystals are printed to create conductive lines with sheet resistance as low as 23 mΩ per square. Optimal printing conditions are found for polyimide dielectric layers and films as thin as 340 nm are produced. These results are used to create spiral inductors, interconnect, and parallel plate capacitors.
Keywords :
ink jet printers; nanolithography; passive networks; printed circuit manufacture; radiofrequency identification; 23 mohm; 340 nm; RFID front-end; conductive lines; gold nanocrystals; high-quality passive devices; ink-jet printing; ink-jet-deposited passive component process; lithography; optimal printing; parallel plate capacitors; polyimide dielectric films; polyimide dielectric layers; printed circuit fabrication; sheet resistance; spiral inductors; Capacitors; Dielectric films; Dielectric thin films; Gold; Inductors; Nanocrystals; Polyimides; Printing; Radiofrequency identification; Spirals; 65; Ink-jet printing; lithography; passive circuits; printed circuit fabrication;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/TED.2004.838451
