DocumentCode :
1174674
Title :
Temperature compensated cuts in LGT crystal microresonators using length extensional mode
Author :
Douchet, Gabrielle ; Sthal, Fabrice ; Bigler, Emmanuel ; Bourquin, Roger
Author_Institution :
Freq. & Time Dept., Ecole Nat. Super. de Mec. et Microtech.
Volume :
56
Issue :
2
fYear :
2009
fDate :
2/1/2009 12:00:00 AM
Firstpage :
239
Lastpage :
240
Abstract :
In this letter, experimental investigation of frequency-temperature effects in langatate rectangular cross-section beams are presented. It is shown that a first-order temperature compensated cut exists for the first vibrating mode of length extension.
Keywords :
crystal resonators; gallium compounds; lanthanum compounds; micromechanical resonators; vibrational modes; LGT crystal microresonators; La3GaxTa1-xO14; frequency-temperature effects; langatate rectangular cross-section beams; piezoelectric materials; vibrating mode; Crystallography; Electrodes; Frequency measurement; Gold; Metallization; Microcavities; Resonant frequency; Sputtering; Temperature distribution; Temperature measurement;
fLanguage :
English
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher :
ieee
ISSN :
0885-3010
Type :
jour
DOI :
10.1109/TUFFC.2009.1031
Filename :
4787174
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1174674
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