• DocumentCode
    1176216
  • Title

    Controlled multibatch self-assembly of microdevices

  • Author

    Xiong, Xiaorong ; Hanein, Yael ; Fang, Jiandong ; Wang, Yanbing ; Wang, Weihua ; Schwartz, Daniel T. ; Böhringer, Karl F.

  • Author_Institution
    Dept. of Electr. Eng., Univ. of Washington, Seattle, WA, USA
  • Volume
    12
  • Issue
    2
  • fYear
    2003
  • fDate
    4/1/2003 12:00:00 AM
  • Firstpage
    117
  • Lastpage
    127
  • Abstract
    A technique is described for assembly of multiple batches of micro components onto a single substrate. The substrate is prepared with hydrophobic alkanethiol-coated gold binding sites. To perform assembly, a hydrocarbon oil, which is applied to the substrate, wets exclusively the hydrophobic binding sites in water. Micro components are then added to the water, and assembled on the oil-wetted binding sites. Moreover, assembly can be controlled to take place on desired binding sites by using an electrochemical method to deactivate specific substrate binding sites. By repeatedly applying this technique, different batches of micro components can be sequentially assembled to a single substrate. As a post assembly procedure, electroplating is incorporated into the technique to establish electrical connections for assembled components. Important issues presented are: substrate fabrication techniques, electrochemical modulation by using a suitable alkanethiol (dodecanethiol), electroplating of tin and lead alloy and binding site design simulations. Finally, we demonstrate a two-batch assembly of silicon square parts, and establishing electrical connectivity for assembled surface-mount light emitting diodes (LEDs) by electroplating.
  • Keywords
    electroplating; light emitting diodes; microassembling; micromechanical devices; self-assembly; surface tension; controlled multibatch self-assembly; electrical connectivity; electrochemical method; electrochemical modulation; electroplating; hydrocarbon oil; hydrophobic binding sites; micro components; microdevices; multiple batches; oil-wetted binding sites; substrate fabrication techniques; surface-mount light emitting diodes; two-batch assembly; Assembly; Fabrication; Gold; Hydrocarbons; Lead; Light emitting diodes; Petroleum; Self-assembly; Silicon; Tin alloys;
  • fLanguage
    English
  • Journal_Title
    Microelectromechanical Systems, Journal of
  • Publisher
    ieee
  • ISSN
    1057-7157
  • Type

    jour

  • DOI
    10.1109/JMEMS.2003.809964
  • Filename
    1192706