Title :
An electric induction micromotor
Author :
Nagle, Steven F. ; Livermore, Carol ; Frechette, Luc G. ; Ghodssi, Reza ; Lang, Jeffrey H.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Massachusetts Inst. of Technol., Cambridge, MA, USA
Abstract :
This paper presents the analysis, design, fabrication, and testing of a planar electric induction micromotor. The micromotor is a 6-phase motor with 131 pole pairs distributed on a stator having a 4 mm outer diameter. The axial air gap is 3 μm. With a 90 V stator excitation, applied at a 300-kHz slip frequency, the motor produces a torque of 2 μN·m. Special attention is paid to the limitations that microfabrication places on the design of the motor.
Keywords :
electrostatic actuators; electrostatic motors; induction motors; 300 kHz; 90 V; DRIE; deep reactive ion etching; duffing oscillator; electric induction micromotor; electrostatic actuator modeling design; power microelectromechanical systems; quasi-static electric induction machine motor generator; Fabrication; Induction generators; Induction machines; Induction motors; Micromotors; Nuclear power generation; Stators; Synchronous motors; Torque; Turbines; Deep reactive ion etching (DRIE); duffing oscillator; electrostatic actuator modeling design analysis; micromotor; power microelectromechanical systems (Power MEMS) fabrication; quasi-static electric induction machine motor generator; torque measurement;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2005.851816
