DocumentCode :
118753
Title :
Effect of magnetism of specimen on energy spectrum analysis
Author :
Yan Yao ; Shengxiang Bao ; Zheng Yuwei
Author_Institution :
State Key Lab. of Electron. Thin Films & Integrated Devices, Univ. of Electron. Sci. & Technol. of China, Chengdu, China
fYear :
2014
fDate :
12-15 Aug. 2014
Firstpage :
996
Lastpage :
1000
Abstract :
With This paper studies the effect to the result of energy spectrum analysis by the magnetic specimen. The electron beam and the interaction between electronics and solid in magnetic field had been discussed, and the escape depth of two elements´ characteristic X-ray had been calculated. From the above that the mechanism and principle of this specimen´s energy spectrum analysis result of error had been confirmed, and coincides with the experimental result. The study result provides an important reference for the analysis worker.
Keywords :
X-ray analysis; electron beams; magnetic devices; magnetic fields; magnetic materials; spectral analysis; characteristic X-ray; electron beam; energy spectrum analysis; escape depth; magnetic field; magnetic material; magnetic specimen effect; Electron beams; Iron; Magnetic analysis; Magnetic fields; Magnetic flux; Scanning electron microscopy; Spectral analysis; deviation mechanism; energy spectrum analysis; magnetic specimen;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electronic Packaging Technology (ICEPT), 2014 15th International Conference on
Conference_Location :
Chengdu
Type :
conf
DOI :
10.1109/ICEPT.2014.6922815
Filename :
6922815
Link To Document :
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