Title :
An Analytical Solution to Circular Touch Mode Capacitor
Author :
Daigle, Maxime ; Corcos, Jacques ; Wu, Ke
Author_Institution :
Poly-Grames Res. Center, Ecole Polytech. de Montreal, Que.
fDate :
4/1/2007 12:00:00 AM
Abstract :
In this paper, a simple but accurate analytical solution is presented to model the flexion of a circular diaphragm with clamped edges under an uniform load. The touch down effect and the evolution of touch radius are considered in this model, making it useful for touch down capacitor devices such as pressure sensors. This model is then compared to results obtained from Coventor, a finite elements analysis program designed for microelectromechanical systems
Keywords :
capacitive sensors; capacitors; diaphragms; finite element analysis; microsensors; pressure sensors; Coventor; MEMS; capacitive sensing; circular diaphragm; circular touch mode capacitor; clamped edges; finite element analysis; flexion model; microelectromechanical systems; pressure sensors; touch down effect; touch radius evolution; uniform load; Biosensors; Capacitive sensors; Capacitors; Finite element methods; Linearity; Microelectromechanical systems; Tactile sensors; Temperature dependence; Temperature sensors; Young´s modulus; Capacitive sensing; circular diaphragm; pressure sensor; touch mode;
Journal_Title :
Sensors Journal, IEEE
DOI :
10.1109/JSEN.2007.891996
