Title :
Development of FeCo-based thin films for gigahertz applications
Author :
Yu, Eunji ; Shim, Jong Sik ; Kim, Inyoung ; Kim, Jongryoul ; Han, Suk Hee ; Kim, Hi Jung ; Kim, Ki Hyeon ; Yamaguchi, Masahiro
Author_Institution :
Dept. of Metall. & Mater. Sci., Hanyang Univ., Ansan, South Korea
Abstract :
For improving high-frequency characteristics and soft magnetic properties of (Fe7Co3)B-based thin films, the effects of Ni addition and an oblique deposition method on the microstructures have been examined. The Ni addition to (Fe7Co3)B films was found to enhance B segregation on grain boundaries, which resulted in the formation of a well-defined columnar structure and the increase of film resistivity. Utilizing the columnar structure, large in-plane anisotropy was induced by an oblique deposition method which enabled the control of the inclination angle of the columns. As a result, the ferromagnetic resonance of (Fe7Co3)71Ni7B22 thin films reached 6.2GHz.
Keywords :
ferromagnetic resonance; grain boundaries; induced anisotropy (magnetic); iron alloys; magnetic thin films; nickel; segregation; soft magnetic materials; sputter deposition; B segregation; FeCo; Ni; columnar structure; ferromagnetic resonance; film resistivity; grain boundary; high-frequency characteristic; large in-plane anisotropy; microstructural analysis; oblique deposition method; soft magnetic property; soft magnetic thin film; Anisotropic magnetoresistance; Conductivity; Grain boundaries; Iron; Magnetic films; Magnetic properties; Magnetic resonance; Microstructure; Sputtering; Transistors; High-frequency characteristics; microstructural analysis; oblique deposition method; soft magnetic thin film;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2005.854667
