Title :
Effects of post-annealing on the magnetic properties of FeCoBN thin film
Author :
Ji, C.W. ; Kim, S.H. ; Kim, I. ; Kim, J. ; Ki Hyeon Kim ; Yamaguchi, Masahiro
Author_Institution :
Dept. of Metall. & Mater. Sci., Hanyang Univ., Ansan, South Korea
Abstract :
Below a critical thickness (∼100 nm), FeCoBN thin films showed excellent soft magnetic properties and high-frequency characteristics. However, it was found that the residual stress sharply degraded their properties over the critical thickness. In order to overcome this limit, magnetic post-annealing process has been carried out in this experiment. The microstructural analysis showed that the annealing effectively removed the residual stress of FeCoBN films without any microstructural changes. This removal improved the soft magnetic properties and high-frequency characteristics of the films of which the thickness was over the critical thickness.
Keywords :
cobalt alloys; iron alloys; magnetic annealing; magnetic thin films; soft magnetic materials; FeCoBN; FeCoBN thin film; high-frequency characteristic; magnetic post-annealing process; microstructural analysis; post-annealing effect; residual stress; soft magnetic property; soft magnetism; Annealing; Iron; Magnetic anisotropy; Magnetic films; Magnetic materials; Magnetic properties; Magnetostriction; Saturation magnetization; Soft magnetic materials; Sputtering; FeCoBN; microstructure; post-annealing; soft magnetism;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2005.854901
