Nanoscale characterization of ferroelectric materials by scanning probe microscope under ultrahigh vacuum

The downsizing trend in multilayer ceramic capacitors (MLCCs) will reach a limit as long as a conventional way of materials development continues. Creation of advanced materials and precise control of materials properties will be a key technology to break through the current situation. To address this issue, scanning probe microscopy under ultrahigh vacuum (UHV-SPM) is employed to clarify materials properties from nanoscale perspective. Kelvin probe force microscopy allows us to obtain surface potential mapping on degraded dielectrics with highly spatial resolution, which is promising to consider degradation mechanism of MLCCs. Piezoresponse force microscopy enables not only to evaluate size dependent properties of ferroelectric nanoislands but also to investigate temperature dependence of domain images in Sn doped strontium titanate ceramics. Characterization of ferroelectrics based on UHV-SPM will open a new way to design future MLCCs.