DocumentCode :
1194157
Title :
Guest editorial ICMTS 2002
Author :
Walton, A.J. ; Mathewson, A. ; McCarthy, K.G.
Author_Institution :
University of Edinburgh
Volume :
16
Issue :
2
fYear :
2003
fDate :
5/1/2003 12:00:00 AM
Firstpage :
179
Lastpage :
180
Keywords :
Application software; Circuit testing; Computer aided manufacturing; Fabrication; Materials reliability; Materials testing; Microelectronics; Pulse measurements; Semiconductor device manufacture; Sliding mode control;
fLanguage :
English
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
Publisher :
ieee
ISSN :
0894-6507
Type :
jour
DOI :
10.1109/TSM.2003.811898
Filename :
1198025
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1194157
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