Title :
Compact 3D-MEMS-meander monopole antenna
Author :
Huang, C.-U. ; Chen, I.-Y. ; Chen, H.J.H. ; Jou, C.F. ; Huang, S.R.-S.
Author_Institution :
Inst. of Electron. Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan
Abstract :
A MEMS meander monopole antenna is fabricated in the form of a folded microstrip on the upper and bottom surfaces of the substrate. This design is based on the meander line principle with a three-dimensional structure to achieve reduced size compared to many other small size printed antennas. The MEMS technologies, such as excimer laser drilling and copper electroplating were used in the fabrication of this antenna. This antenna can be mounted on the silicon wafer by anodic bonding technology. The design features 2.45 GHz operating frequency with 190 MHz bandwidth for WLAN applications. The geometric length of the antenna is 21 mm, and the width is 4 mm. Measured results have good agreement with simulation data.
Keywords :
UHF antennas; electroplating; laser beam machining; micromechanical devices; microstrip antennas; monopole antennas; 190 MHz; 2.45 GHz; 21 mm; 4 mm; MEMS technologies; anodic bonding technology; antenna fabrication; compact 3D MEMS meander monopole antenna; copper electroplating; excimer laser drilling; folded microstrip; meander line principle; silicon wafer;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20052677
