Title :
A New Microwave Method of Measuring Complex Dielectric Constant of High-Permittivity Thin Films
Author :
Gupta, Chinmoy Das
fDate :
3/1/1975 12:00:00 AM
Abstract :
A new method of measurement of complex dielectric constant of thin films of high-permittivity materials at microwave range of frequencies is suggested. The experimental sample is in the form of a planar condensor supported by means of (¿/2)g substrate inside the waveguide. ¿ of the sample is found by noting the resonant frequency, and tg¿ is obtained from the reflection coefficient of the resonance-tuned system. A working equation for the capacitor is derived with help of conformal mapping. The applicability of the method has been verified with an experimental sample of BaTiO3.
Keywords :
Dielectric constant; Dielectric materials; Dielectric measurements; Dielectric substrates; Dielectric thin films; Frequency measurement; High-K gate dielectrics; Microwave measurements; Microwave theory and techniques; Planar waveguides;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
DOI :
10.1109/TIM.1975.4314370