Title :
Microstructure and magnetic properties of FeTaN films
Author :
Haftek, E. ; Barnard, J.A.
Author_Institution :
Dept. of Metall. & Mater. Eng., Alabama Univ., Tuscaloosa, AL, USA
fDate :
11/1/1994 12:00:00 AM
Abstract :
This paper investigates single layer dc magnetron sputtered FeTaN films of varying nitrogen content and thickness. Crystallographic aspects of (110) plane disorientation, lattice deformation and their relationship to coercive force and anisotropy field are analyzed
Keywords :
coercive force; crystal microstructure; crystal orientation; ferromagnetic materials; iron alloys; magnetic anisotropy; magnetic permeability; magnetic thin films; soft magnetic materials; sputter deposition; sputtered coatings; tantalum alloys; (110) plane disorientation; DC magnetron sputtering; FeTaN; FeTaN films; anisotropy field; coercive force; crystallographic aspects; lattice deformation; magnetic properties; nitrogen content; thickness; Anisotropic magnetoresistance; Coercive force; Crystallography; Lattices; Magnetic anisotropy; Magnetic films; Magnetic properties; Microstructure; Nitrogen; Perpendicular magnetic anisotropy;
Journal_Title :
Magnetics, IEEE Transactions on
