On-wafer calibration algorithm for partially leaky multiport vector network analyzers

A new solution for multiport vector network analyzer calibration is presented in this paper. The error model is divided in two separate leaky halves, each of them with crosstalk terms, but without the leakage between the two sides. This error model is particularly useful for on-wafer measurements, when multisignal probes are employed and the crosstalk among probe fingers may dramatically affect the measurement accuracy. We will show that, with a simple choice of calibration standards, the new procedure takes the same time of a classical two-port line-reflect-match or thru-reflect-line calibration. The proposed algorithm is verified with measurements and simulations in both coaxial and on-wafer environments.