Title :
MEMS deformable mirror with integrated black silicon aperture
Author :
Tianbo Liu ; Dickensheets, David L.
Author_Institution :
Montana State Univ., Bozeman, MT, USA
Abstract :
This paper describes a method to integrate a black aperture around a MEMS deformable mirror. Silicon grass (black silicon) is etched on the areas surrounding the mirror membrane to absorb and scatter light. This eliminates specular reflection of light from the silicon substrate around the mirror, increasing optical contrast during imaging. The design, fabrication process, and performance of this integrated aperture are presented.
Keywords :
elemental semiconductors; integrated optics; light absorption; light scattering; micromechanical devices; micromirrors; silicon; sputter etching; MEMS deformable mirror; Si; etching; integrated aperture; integrated black silicon aperture; light absorption; light scattering; mirror membrane; optical contrast; silicon grass; silicon substrate; specular reflection elimination; Aluminum; Apertures; Mirrors; Optical device fabrication; Optical reflection; Optical scattering; Silicon; MEMS Deformable Mirror; black silicon; image contrast; integrated aperture;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2014 International Conference on
Conference_Location :
Glasgow
Print_ISBN :
978-0-9928-4140-9
DOI :
10.1109/OMN.2014.6924529
