• DocumentCode
    121306
  • Title

    X-ray irradiation test of a MEMS-based X-ray optic

  • Author

    Ogawa, Tomomi ; Ezoe, Yuichiro ; Kakiuchi, Takuya ; Ikuta, Masahiro ; Sato, Mitsuhisa ; Ohashi, Takaya ; Mitsuishi, Ikuyuki ; Mitsuda, Kazuhisa ; Morishita, Kohei ; Nakajima, Kensuke

  • Author_Institution
    Tokyo Metropolitan Univ., Tokyo, Japan
  • fYear
    2014
  • fDate
    17-21 Aug. 2014
  • Firstpage
    131
  • Lastpage
    132
  • Abstract
    MEMS technolgies can provide future space missions with ultra light-wight and high resolution optics. We conducted an X-ray irradiation test of our first MEMS-based Wolter type-I optic. However, a focus was weak and wide spread. Hence, we improved fabrication processes and an alignment system. In this paper, we report on results of the latest X-ray irradiation test of our new Wolter type-I optic. The angular resolution and effective area were 4.1 arcmin and 32 mm2 both of which are 3 and 40 times better than those in the first test.
  • Keywords
    X-ray optics; micro-optics; micromechanical devices; MEMS; Wolter type-I optic; X-ray irradiation test; X-ray optic; space missions; Accuracy; Fabrication; Micromechanical devices; Optics; Radiation effects; Silicon; X-ray imaging; Wolter type-I; X-ray optics;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Nanophotonics (OMN), 2014 International Conference on
  • Conference_Location
    Glasgow
  • ISSN
    2160-5033
  • Print_ISBN
    978-0-9928-4140-9
  • Type

    conf

  • DOI
    10.1109/OMN.2014.6924555
  • Filename
    6924555
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=121306