DocumentCode
121335
Title
Polarization-dependent Talbot effect with variable duty cycle
Author
Shubin Li ; Changhe Zhou ; Barbastathis, George
Author_Institution
Shanghai Inst. of Opt. & Fine Mech., Shanghai, China
fYear
2014
fDate
17-21 Aug. 2014
Firstpage
183
Lastpage
184
Abstract
It has recently been observed that the location of Talbot planes becomes dependent on polarization of the incident light for grating periods in the rage of 2~3 free-space wavelengths. Here, we investigate the effect of grating duty cycle and its potential use for control of two- or three-dimensional pattern formation in nanolithography.
Keywords
Talbot effect; diffraction gratings; light polarisation; nanolithography; nanophotonics; Talbot planes; nanolithography; pattern formation; polarization-dependent Talbot effect; variable duty cycle; Delays; Diffraction; Gratings; Indexes; Optical polarization; Optimized production technology; Talbot effect;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics (OMN), 2014 International Conference on
Conference_Location
Glasgow
ISSN
2160-5033
Print_ISBN
978-0-9928-4140-9
Type
conf
DOI
10.1109/OMN.2014.6924584
Filename
6924584
Link To Document