Title :
A study of fluorine doping azo transparent conductive oxide films for thin film copper indium gallium selenide solar cells on flexible substrates
Author :
Sevvana, Swati ; Zubeck, Bob ; Cheung, Kee Kee ; Mackie, N.
Author_Institution :
MiaSole Hi-Tech Corp., Santa Clara, CA, USA
Abstract :
Transparent conductive oxide film properties impact both performance and reliability of solar products. High optical transmission and good moisture stability is desired. In this paper we present results for Fluorine doped AZO study. Two deposition techniques (DC sputtering from zinc fluoride doped AZO target and reactive sputtering in CF4 gas) were used to baseline and study full compositional space. The optical properties, sheet resistance, composition, IV characteristics and moisture stability of the resulting films are compared to non-fluorine doped AZO films. Addition of Fluorine to AZO improved optical transmission and moisture stability without impacting electrical performance resulting in improved conversion efficiencies of completed thin film CIGS solar cells.
Keywords :
carbon compounds; copper compounds; fluorine; gallium compounds; indium compounds; reliability; solar cells; sputtering; CF4; CIGS; IV characteristics; compositional space; flexible substrates; fluorine doping AZO; moisture stability; nonfluorine doped AZO films; optical properties; optical transmission; reactive sputtering; reliability; sheet resistance; solar products; thin film solar cells; transparent conductive oxide film properties; Glass; Moisture; Optical films; Photovoltaic cells; Substrates; Zinc oxide; CF4; CIGS; FAZO; Thin film;
Conference_Titel :
Photovoltaic Specialist Conference (PVSC), 2014 IEEE 40th
Conference_Location :
Denver, CO
DOI :
10.1109/PVSC.2014.6925351