DocumentCode
1225317
Title
Electro-optic probing of RF signals in submicrometre MMIC devices
Author
David, G. ; Bussek, P. ; Auer, U. ; Tegude, F.J. ; Jäger, D.
Author_Institution
Gerhard-Mercator-Univ., Duisburg, Germany
Volume
31
Issue
25
fYear
1995
fDate
12/7/1995 12:00:00 AM
Firstpage
2188
Lastpage
2189
Abstract
A high resolution electro-optic measurement system for probing RF electric field distributions in submicrometre MMIC devices is presented. As an example, field distributions in an interdigital structure are displayed, revealing a spatial resolution of much less than 0.5 μm. This feature makes electro-optic probing a unique technique for circuit- and also device-internal measurements of electrical signals combining high bandwidth and noninvasiveness with submicrometre resolution
Keywords
MMIC; electric field measurement; electro-optical effects; integrated circuit measurement; microwave measurement; RF signals; bandwidth; electric field distribution; electro-optic probing; interdigital structure; internal measurement; noninvasiveness; spatial resolution; submicrometre MMIC devices;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19951465
Filename
481038
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