Title :
Zero-Temperature-Coefficient SAW Devices on AlN Epitaxial Films
Author :
Tsubouchi, Kazuo ; Mikoshiba, Nobuo
Keywords :
Piezoelectric films; Radio frequency; Radiofrequency integrated circuits; Semiconductor films; Silicon; Substrates; Surface acoustic wave devices; Surface acoustic waves; Temperature; Thin film devices;
Journal_Title :
Sonics and Ultrasonics, IEEE Transactions on
DOI :
10.1109/T-SU.1985.31647
