Title :
Imaging of in- and out-of-plane vibrations in micromechanical resonator
Author :
Holmgren, O. ; Kokkonen, K. ; Mattila, T. ; Kaajakari, V. ; Oja, A. ; Kiihamäki, J. ; Knuuttila, J.V. ; Salomaa, M.M.
Author_Institution :
Mater. Phys. Lab., Helsinki Univ. of Technol.
Abstract :
Vibrations in a micromechanical 13.1 MHz bulk acoustic mode silicon resonator have been imaged with a scanning Michelson laser interferometer. A novel detection scheme utilizing the Michelson interferometer is developed, which enables imaging the in-plane vibrations in addition to the out-of-plane component. The novel imaging technique is demonstrated by measuring the vibrations of the extensional and Lame modes in a square plate resonator
Keywords :
Michelson interferometers; acoustic resonators; bulk acoustic wave devices; elemental semiconductors; micromechanical resonators; silicon; vibration measurement; 13.1 MHz; Lame modes; Si; bulk acoustic mode silicon resonator; in-plane vibration imaging; micromechanical resonator; out-of-plane vibration imaging; scanning Michelson laser interferometer; square extensional mode; square plate resonator; vibration measurement;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20057018
