DocumentCode
1234924
Title
Acoustic Accelerometers
Author
Motamedi, M. Edward
Volume
34
Issue
2
fYear
1987
fDate
3/1/1987 12:00:00 AM
Firstpage
237
Lastpage
242
Keywords
Accelerometers; Crystallization; Manufacturing; Piezoelectric devices; Piezoelectric transducers; Piezoresistance; Resistors; Structural beams; Surface acoustic waves; Vibration measurement;
fLanguage
English
Journal_Title
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher
ieee
ISSN
0885-3010
Type
jour
DOI
10.1109/T-UFFC.1987.26937
Filename
1539908
Link To Document