Fabrication of all YBaCuO trilayer Josephson junctions with YBaCuO wiring layer

Author

Sato, Hiroshi ; Fujimoto, Eiji ; Yamada, Toshikazu ; Akoh, Hiroshi

Author_Institution

Correlated Electron Res. Center, Nat. Inst. of Adv. Ind. Sci. & Technol., Ibaraki, Japan

Volume

13

Issue

2

fYear

2003

fDate

6/1/2003 12:00:00 AM

Firstpage

797

Lastpage

800

Abstract

We report a fabrication process of c-axis oriented all YBaCuO trilayer Josephson junctions with YBaCuO wiring layers. The trilayer junctions consisted of YBaCuO (170nm)/PrBaCuO (28 nm)/YBaCuO (170 nm) structures. CeO₂ films (520nm) and YBaCuO films (1.2 μm) were used as insulating layers and wiring layers, respectively. A junction with a dimension of 7 μm×7 μm showed a critical current I_c of 1.6 mA and a junction resistance R_n of 1.2 Ω at 4.2 K. The values of the critical current density and the I_cR_n product were estimated to be 3.3kA/cm² and 1.9 mV, respectively. Note that the junction exhibited I_cR_n product of 1.0 mV even at 30 K. From these results, the junction is promising candidate for satisfying the requirements for HTS integrated circuits.

Keywords

Josephson effect; barium compounds; critical current density (superconductivity); high-temperature superconductors; yttrium compounds; 30 K; 4.2 K; CeO₂; CeO₂ film; YBaCuO film; YBaCuO trilayer Josephson junction; YBaCuO-PrBaCuO-YBaCuO; c-axis orientation; critical current density; fabrication process; high-T_c superconductor; insulating layer; integrated circuit; normal state resistance; wiring layer; Critical current; Fabrication; High temperature superconductors; Josephson junctions; Substrates; Superconducting epitaxial layers; Superconducting films; Superconducting integrated circuits; Wiring; Yttrium barium copper oxide;

fLanguage

English

Journal_Title

Applied Superconductivity, IEEE Transactions on

Publisher

ieee

ISSN

1051-8223

Type

jour

DOI

10.1109/TASC.2003.814047

Filename

1211724