High spatial resolution diagnostics of optical waveguides using a photon-scanning tunneling microscope

Author

Toda, Y. ; Ohtsu, M.

Author_Institution

Interdisciplinary Grad. Sch. of Sci. and Eng., Tokyo Inst. of Technol., Japan

Volume

7

Issue

1

fYear

1995

Firstpage

84

Lastpage

86

Abstract

We propose a high-resolution diagnostics technique for optical waveguides using a photon-scanning tunneling microscope (P-STM). This technique has the advantageous capabilities of nondestructive measurement and informative analysis of guided mode. The capability of this technique was evaluated by measuring the characteristics of an LiTaO₃ waveguide. Scattered light spot of 500-nm diameter caused by defects was measured, and a normalized width was estimated to be 3.7 μm. Moreover, we obtained the power dispersion in Y-branch waveguides, which were in good agreement with the theoretical plots calculated by the beam propagation method (BPM).

Keywords

light scattering; lithium compounds; optical dispersion; optical microscopy; optical resolving power; optical testing; optical waveguides; scanning tunnelling microscopy; 500 nm; 633 nm; 680 nm; LiTaO/sub 3/; LiTaO/sub 3/ waveguide; Y-branch waveguides; beam propagation method; defects; guided mode; high spatial resolution; high-resolution diagnostics technique; informative analysis; nondestructive measurement; normalized width; optical waveguides; photon-scanning tunneling microscope; power dispersion; scattered light spot; Light scattering; Optical microscopy; Optical propagation; Optical scattering; Optical waveguide theory; Optical waveguides; Particle scattering; Spatial resolution; Tunneling; Waveguide theory;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.363368

Filename

363368