Wavelength control of vertical cavity surface-emitting lasers by using nonplanar MOCVD

We present a novel approach of on-wafer wavelength control for vertical cavity surface-emitting lasers (VCSELs) using nonplanar metalorganic chemical vapor deposition. The resonant wavelength of 980 nm VCSELs grown on a patterned substrate can be controlled in the wavelength range over 45 nm by changing the size of circular patterns. A multi-wavelength VCSEL linear array was fabricated by using this technique. The proposed method will be useful for multi-wavelength VCSEL arrays as well as for the cancellation of wavelength nonuniformity over a wafer.<>