The influence of MEMS on electromagnetic NDT

There are some challenges in Electromagnetic Nondestructive Testing (EM NDT) techniques. Micro cracks are too small to find and evaluate at the beginning. Complex components are hardly to inspect. The volumetric sensor is difficult to be embedded in the structures. To solve these problems, Micro-Electro-Mechanical Systems (MEMS) was presented to fabricate micro inductive coils as eddy current sensor. With the help of rapid development of MEMS, a lot of merits are brought to EM sensors, like high spatial resolution, high sensitivity, be adapted to complex structure, flexible substrate, be easily embedded, and on-chip integration. This paper reviews the influences of MEMS on EM sensors and introduces some classical methodologies to fabricate and develop EM sensors.