Title :
Micromachined varactor with wide tuning range
Author :
Dec, A. ; Suyama, Koichi
Author_Institution :
Dept. of Electr. Eng., Columbia Univ., New York, NY
fDate :
5/22/1997 12:00:00 AM
Abstract :
A micromachined variable capacitor that achieves a wide tuning range is proposed. The device, which was fabricated in a polysilicon surface micromachining process, has a tuning range of 25% and a quality factor of 9.6 at 1 GHz when the capacitance is tuned to 4pF
Keywords :
Q-factor; micromachining; tuning; varactors; 1 GHz; 4 pF; Si; polysilicon; quality factor; surface micromachining; tuning range; varactor; variable capacitor;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19970628
