Title :
Correction to “A General Methodology to Predict the Reliability of Single-Crystal Silicon MEMS Devices”
Author :
Fitzgerald, Alissa M. ; Pierce, David M. ; Huigens, Brent M. ; White, Carolyn D.
Abstract :
In the above titled paper (ibid., vol., 18, no. 4, pp. 962-970, Aug. 2009), there is a typographical error in equation (7). The correct equation is presented here.
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2009.2035674
