• DocumentCode
    1274875
  • Title

    3D simulation of electrostatic-mechanical transducers using algebraic multigrid

  • Author

    Kaltenbacher, M. ; Landes, H. ; Reitzinger, S. ; Peipp, R.

  • Author_Institution
    Dept. of Sensor Technol., Univ. of Erlangen, Germany
  • Volume
    38
  • Issue
    2
  • fYear
    2002
  • fDate
    3/1/2002 12:00:00 AM
  • Firstpage
    985
  • Lastpage
    988
  • Abstract
    A finite-element (FE) simulation scheme which allows the efficient calculation of electrostatic transducers immersed in an acoustic fluid is presented. Therewith, the full coupling between the electric, mechanical, and acoustic field is taken into account. Since the entries of the electric system matrix (obtained by the FE method) vary as a function of the mechanical displacement, the algebraic system of equations for the electrostatic problem is solved by an appropriate algebraic multigrid method
  • Keywords
    capacitive sensors; electrostatic devices; ultrasonic transducers; 3D simulation; acoustic fluid; algebraic multigrid; algebraic system of equations; electric system matrix; electrostatic problem; electrostatic-mechanical transducers; full coupling; mechanical displacement; Acoustic transducers; Acoustic waves; Couplings; Electric potential; Electrostatics; Finite element methods; Iron; Nonlinear equations; Partial differential equations; Ultrasonic transducers;
  • fLanguage
    English
  • Journal_Title
    Magnetics, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9464
  • Type

    jour

  • DOI
    10.1109/20.996253
  • Filename
    996253