Title :
A design flow for micromachined electromechanical systems
Author :
Swart, Nicholas R.
Author_Institution :
Analog Devices Inc., Cambridge, MA, USA
Abstract :
I present a design flow for integrated microelectromechanical systems (MEMS), with particular focus on electromechanical devices. Several design examples of real-world devices are given.
Keywords :
circuit CAD; micromechanical devices; MEMS; design flow; electromechanical devices; integrated microelectromechanical systems; micromachined electromechanical systems; Circuits; Design engineering; Electromechanical devices; Electromechanical systems; Environmental management; Manufacturing processes; Microelectromechanical systems; Micromechanical devices; Process design; Usability;
Journal_Title :
Design & Test of Computers, IEEE
