Simulation and experimental characterization of a 2-D capacitive micromachined ultrasonic transducer array element

Author

Oralkan, Ömer ; Jin, Xuecheng ; Degertekin, F. Levent ; Khuri-Yakub, Butrus T.

Author_Institution

Edward L. Ginzton Lab., Stanford Univ., CA, USA

Volume

46

Issue

6

fYear

1999

Firstpage

1337

Lastpage

1340

Abstract

In this letter, a 400-/spl mu/m/spl times/400-/spl mu/m 2-D capacitive micromachined ultrasonic transducer (cMUT) array element is experimentally characterised, and the results are found to be in good agreement with theoretical predictions. As a receiver, the transducer has a 1.8/spl times/10/sup -7/ nm//spl radic/(Hz) displacement sensitivity, and, as a transmitter, it produces 16.4 kPa/V of output pressure at the transducer surface at 3 MHz. The transducer also has more than 100% fractional bandwidth around 3 MHz, which makes it suitable for ultrasound imaging.

Keywords

capacitive sensors; piezoelectric transducers; ultrasonic imaging; ultrasonic transducer arrays; 2D capacitive transducer; 3 MHz; 400 micron; US receiver; US transmitter; displacement sensitivity; fractional bandwidth; micromachined ultrasonic transducer; ultrasonic transducer array; ultrasound imaging; Bandwidth; Biomembranes; Equivalent circuits; Piezoelectric transducers; Predictive models; Transmitters; Ultrasonic imaging; Ultrasonic transducer arrays; Ultrasonic transducers; Voltage;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/58.808855

Filename

808855