CMOS integrated ciliary actuator array as a general-purpose micromanipulation tool for small objects

Author

Suh, John W. ; Darling, R. Bruce ; Böhringer, Karl-F ; Donald, Bruce R. ; Baltes, Henry ; Kovacs, Gregory T A

Author_Institution

Syst. & Practices Lab., Xerox Palo Alto Res. Center, CA, USA

Volume

8

Issue

4

fYear

1999

fDate

12/1/1999 12:00:00 AM

Firstpage

483

Lastpage

496

Abstract

The first micromachined bimorph organic ciliary array with on-chip CMOS circuitry is presented. This ciliary array is composed of an 8×8 array of cells each having four orthogonally oriented actuators in an overall die size of 9.4×9.4 mm. The polyimide-based actuators were fabricated directly above the selection and drive circuitry, Selection and activation of actuators in this array shows that integration was successful. The array was programmed to do simple linear and diagonal translations and squeeze-, centering-, and rotating-field manipulations. All three tasks were demonstrated using silicon pieces of various shapes and either 0.55 mm or 0.10 mm thick

Keywords

CMOS integrated circuits; microactuators; micromachining; micromanipulators; CMOS integrated circuit; Si; micromachined bimorph; micromanipulation; organic ciliary array; polyimide actuator; Buildings; Circuits; Electrostatic actuators; Micromechanical devices; Nanofabrication; Piezoelectric actuators; Polyimides; Resistors; Shape; Silicon;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/84.809064

Filename

809064