Title :
Wide Bandwidth Silicon Nitride Grating Coupler
Author :
Doerr, Christopher R. ; Chen, Long ; Chen, Young-Kai ; Buhl, Larry L.
Author_Institution :
Bell Labs., Alcatel-Lucent, Holmdel, NJ, USA
Abstract :
We demonstrate a one-dimensional grating coupler in silicon nitride with a 67-nm 1-dB bandwidth, the largest reported for a grating coupler butt-coupled to standard single-mode fiber. The peak coupling efficiency is -4.2dB. It requires no partial etch and requires only 0.6-μm fabrication resolution.
Keywords :
diffraction gratings; integrated optics; optical fibre couplers; optical fibre fabrication; silicon compounds; wide band gap semiconductors; Si3N4; fabrication resolution; integrated optics; peak coupling efficiency; single-mode fiber; wide bandwidth silicon nitride 1D grating coupler; Bandwidth; Couplers; Coupling circuits; Etching; Fiber gratings; Gratings; Optical coupling; Optical fiber couplers; Optical fiber polarization; Optical waveguides; Semiconductor waveguides; Silicon; Grating coupler; integrated optics; optical fiber; silicon nitride;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2010.2062497
