DocumentCode
1283434
Title
Planar 1/8 splitter in glass by photoresist masked silver film ion exchange
Author
Poyhonen, P. ; Honkanen, S. ; Tervonen, A.
Author_Institution
Nokia Res. Center, Espoo, Finland
Volume
27
Issue
15
fYear
1991
fDate
7/18/1991 12:00:00 AM
Firstpage
1319
Lastpage
1320
Abstract
Fabrication of singlemode glass waveguide devices by silver film ion exchange with standard photoresist as a mask for the ion exchange is proposed. The process uses the advantages of the silver film ion exchange and the simple and accurate patterning when photoresist is used directly as a mask. As a component example, a singlemode 1/8 power splitter is fabricated and measured.
Keywords
integrated optics; ion exchange; metallic thin films; optical waveguide components; optical waveguides; optical workshop techniques; silver; Ag film ion exchange; patterning; photoresist masked film; planar splitter; singlemode 1/8 power splitter; singlemode glass waveguide devices; standard photoresist;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19910829
Filename
81214
Link To Document